Method for converting hydrogen-terminated diamond into fluorine-terminated diamond
The invention discloses a method for converting hydrogen-terminated diamond into fluorine-terminated diamond. The method comprises the following steps: S1, preparing a source electrode and a drain electrode on the top surface of a pretreated hydrogen-terminated diamond substrate, wherein ohmic conta...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
20.04.2021
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a method for converting hydrogen-terminated diamond into fluorine-terminated diamond. The method comprises the following steps: S1, preparing a source electrode and a drain electrode on the top surface of a pretreated hydrogen-terminated diamond substrate, wherein ohmic contact is formed between the source electrode and the hydrogen-terminated diamond substrate and between the drain electrode and the hydrogen-terminated diamond substrate; S2, depositing a LiF dielectric layer on the top surface of the hydrogen terminal diamond substrate between the source electrode and the drain electrode; S3, processing the rest areas on the top surface of the hydrogen-terminated diamond substrate except the areas covered by the source electrode, the drain electrode and the LiF dielectric layer into non-conductive oxygen-terminated isolation areas; S4, preparing a continuous grid electrode above the LiF dielectric layer and the oxygen-terminated isolation region in a contact mode, and completing prepa |
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Bibliography: | Application Number: CN201910986605 |