Method for converting hydrogen-terminated diamond into fluorine-terminated diamond

• Main Authors: WANG WEI, HUI SIJIA, CHANG CHENGDONG, WANG HONGXING, ZHANG SHAOPENG, WANG YANFENG, CHANG XIAOHUI
• Format: Patent
• Language: Chinese; English
• Published: 20.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a method for converting hydrogen-terminated diamond into fluorine-terminated diamond. The method comprises the following steps: S1, preparing a source electrode and a drain electrode on the top surface of a pretreated hydrogen-terminated diamond substrate, wherein ohmic contact is formed between the source electrode and the hydrogen-terminated diamond substrate and between the drain electrode and the hydrogen-terminated diamond substrate; S2, depositing a LiF dielectric layer on the top surface of the hydrogen terminal diamond substrate between the source electrode and the drain electrode; S3, processing the rest areas on the top surface of the hydrogen-terminated diamond substrate except the areas covered by the source electrode, the drain electrode and the LiF dielectric layer into non-conductive oxygen-terminated isolation areas; S4, preparing a continuous grid electrode above the LiF dielectric layer and the oxygen-terminated isolation region in a contact mode, and completing prepa