Inlet transition vacuum cavity and magnetron sputtering coating production line

• Main Authors: ZHANG SHAOBO, SHAO SHUAI, LUO DAN, PENG CHENG, XU BO, ZHONG RUMEI, LI JUNCHEN, CHEN CHENG, NI ZHISEN, YANG JINFA
• Format: Patent
• Language: Chinese; English
• Published: 13.04.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides an inlet transition vacuum cavity and a magnetron sputtering coating production line. The inlet transition vacuum cavity comprises a base, a transfer frame and a sheet inserting mechanical arm. The base and a shell are welded and fixed, multiple glass sheet inserting frame channels are formed on one side of the shell, glass sheet inserting frames are fixedly installed in the glass sheet inserting frame channels through bolts, and a frame inlet channel and a frame outlet channel communicate with corresponding channels formed in a coating cabin and a transfer cabin correspondingly. The transfer frame is movably installed on the base, and the sheet inserting mechanical arm is used for clamping glass and transferring the glass on the glass sheet inserting frames to a glass inserting frames. A sheet inserting device is arranged in the transition vacuum cavity, so that the vacuum degree in the transition vacuum cavity is kept in a state of being close to or consistent with a coating cavity, t