OZONATED WATER DELIVERY SYSTEM AND METHOD OF USE

• Main Authors: SEIWERT HEINRICH, BRAMMER ULRICH, LE TIEC CHRISTIANE
• Format: Patent
• Language: Chinese; English
• Published: 02.04.2021
• Subjects: CHEMISTRY; METALLURGY; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapurewater conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water outputconduit may be in communication with the contacting device. 本申请公开了一种臭氧水输送系统，所述臭氧水输送系统包含：至少一个接触装置，所述至少一个接触装置与被配置成提供超纯水的至少一个超纯水源连通；至少一个超纯水导管，所述至少一个超纯水导管耦接到所述超纯水源；至少一种溶液，所述至少一种溶液通过所述超纯水导管与所述接触装置和所述超纯水源连通；一个或多个气体源，所述一个或多个气体源含有至少一种