Thermal resistance measuring instrument calibration method and device based on thermal resistance standard component

• Main Authors: ZHENG SHIQI, CHENG XIAOHUI, ZHAI YUWEI, DING CHEN, LI HAO, FAN YAJIE, LIU XIAMEI
• Format: Patent
• Language: Chinese; English
• Published: 19.03.2021
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention is suitable for the technical field of semiconductors and provides a thermal resistance measuring instrument calibration method and device based on a thermal resistance standard component. The method comprises steps of controlling the thermal resistance standard part to be at a preset temperature, inputting a preset test current to the thermal resistance standard part, and measuringa first junction voltage of the thermal resistance standard part, determining a temperature calibration curve of the thermal resistance standard component according to the preset temperature and the first junction voltage; inputting a preset working current to the thermal resistance standard part, and measuring a second junction voltage of the thermal resistance standard part after the junction temperature of the thermal resistance standard part is stable; based on the temperature calibration curve and the second junction voltage, determining the junction temperature of the thermal resistancestandard component under t