Low cross-axis crosstalk sensitive structure and manufacturing method thereof

• Main Authors: WANG CHENSHENG, GENG ANBING, DONG TINGTING, WANG JIANBO, YAO YUAN
• Format: Patent
• Language: Chinese; English
• Published: 02.03.2021
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

The invention relates to a low-cross-axis crosstalk sensitive structure and a manufacturing method thereof, the low-cross-axis crosstalk sensitive structure is located right below a diffraction grating in an optical micro-accelerometer, and the sensitive structure comprises an inertial mass block, a...