REFILL AND REPLACEMENT METHOD FOR DROPLET GENERATOR

• Main Authors: ZHENG BOZHONG, ZHANG XIAOLUN, ZHANG HANLONG, TU SHIYU, CHEN LIRUI
• Format: Patent
• Language: Chinese; English
• Published: 26.02.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Disclosed is a refill and replacement method for a droplet generator. The method includes ejecting a metal droplet from a reservoir of a droplet generator toward a zone of excitation in front of a collector, emitting an excitation laser toward the zone of excitation, such that the metal droplet is heated by the excitation laser to generate extreme ultraviolet (EUV) radiation, halting the emissionof the excitation laser, depressurizing the reservoir of the droplet generator, cooling down the droplet generator to a temperature not lower than about 150 DEG C., and refilling the reservoir of thedroplet generator with a solid metal material at the temperature not lower than about 150 DEG C. 本案提供一种微影系统的预防维修操作方法，包括以下步骤：将金属液滴从液滴产生器的储蓄器喷向收集器前方的激发区，将激发激光朝向激发区发射，使得金属液滴通过激发激光加热以生成极紫外(EUV)辐射，停止激发激光的发射，使液滴产生器的储蓄器减压，使液滴产生器冷却至不低于约150℃的温度，以及在不低于约150℃的温度下用固体金属材料回填液滴产生器的储蓄器。