Tunable FP optical filter based on lithium niobate film

• Main Authors: ZHANG YUNXIAO, SUN WENBAO
• Format: Patent
• Language: Chinese; English
• Published: 23.02.2021
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The invention belongs to the technical field of thin-film narrow-band filters, and particularly relates to a tunable FP optical filter based on a lithium niobate film. The tunable FP optical filter comprises a substrate, a first metal layer, an electro-optic tunable lithium niobate film light transmission layer and a second metal layer. By controlling the voltage between the first metal layer andthe second metal layer, the central wavelength of the tunable FP optical filter of the present invention of a tunable filter can be adjusted. The lithium niobate film is used as the cavity material ofa half-wave resonant cavity in an optical interference film, has a wide light transmission window, a high electro-optical coefficient and good temperature stability, can greatly reduce the optical loss of the narrow-band tunable filter, and realizes the tunable central wavelength. According to the invention, the problems of large optical loss, low tuning speed, temperature sensitivity and the like of an existing MEMS ther