Immersion liquid recovery system and immersion liquid recovery method adopting same

• Main Authors: FU XIN, CHEN WENYU, TONG JINJIE, XU NING, CHI YOUYANG, LI YUAN, DU LIANG, WU MIN
• Format: Patent
• Language: Chinese; English
• Published: 29.01.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention discloses an immersion liquid recovery system and an immersion liquid recovery method adopting the same. The immersion liquid recovery system comprises a recovery cavity, a sealed pumping drainage opening, a recovery flow path, a gas-liquid separator and a pore plate; the sealed pumping drainage opening and the recovery cavity are formed in a tail end objective lens and are positioned in an immersion liquid supply and recovery device above a substrate; the sealed pumping drainage opening is located in the immersion liquid supply and recovery device and faces the substrate, and the sealed pumping drainage opening extracts immersion liquid from a gap between the immersion liquid supply and recovery device and the substrate and extracts gas on the radial outer side of the immersion liquid from the gap; the recovery cavity is positioned in the immersion liquid supply recovery device and is communicated with the sealed pumping drainage opening; the recovery cavity is communicated with an accommodatin