Metal oxide micro-nano structure as well as preparation method and application thereof

• Main Authors: WANG YINGCHEN, JIAO BINZHANG, XIONG WEI, YU KEWANG, FAN XUHAO, LONG JING, XU YINUO, GAO HUI, LIU YUNCHENG, DENG LEIMIN
• Format: Patent
• Language: Chinese; English
• Published: 26.01.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention belongs to the technical field of micro-nano material synthesis and device preparation, and particularly relates to a metal oxide micro-nano structure and a preparation method and application thereof. The preparation method comprises the following steps: mixing a metal oxide precursor sol-gel with an alcohol organic modifier, coating the mixture on the surface of a substrate, performing direct writing on a precursor sol-gel film by adopting femtosecond laser, and reacting the metal oxide precursor to generate metal oxide by utilizing heat generated at a femtosecond laser light focal point, meanwhile, forming a metal oxide micro-nano structure on the surface of the substrate; as the alcohol organic modifier is added into the sol-gel, experiments prove that the organic modifiercan significantly improve the micro-nano structure morphology of the obtained metal oxide, so that the nanoparticles are continuous and uniform; and the switch ratio of the ultraviolet micro-nano photoelectric detector prepa