VERTICAL CAVITY SURFACE EMITTING DEVICE WITH A BURIED INDEX GUIDING CURRENT CONFINEMENT LAYER

• Main Authors: WANG JIAXING, COOK KEVIN T, KOLEV EMIL, CHANG-HASNAIN CONSTANCE J, KAPRAUN JONAS H
• Format: Patent
• Language: Chinese; English
• Published: 05.01.2021
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

A vertical cavity surface emitter device (e.g., VCSEL or RC-LED) containing a buried index-guiding current confinement aperture layer which is grown, and lithographically processed to define position,shape and dimension of an inner aperture. In a regrowth process, the aperture is filled with a single crystalline material from the third contact layer. The aperture provides for both current and optical confinement, while allowing for higher optical power output and improved thermal conductivity. 一种垂直腔面发射器器件(例如，VCSEL或RC-LED)含有埋入式折射率引导型电流限制孔层，所述限制孔层生长并被光刻处理以限定内部孔的位置、形状和尺寸。在再生工艺中，所述孔被第三接触层的单晶材料填充。所述孔提供用于电流限制和光限制，同时允许更高的光功率输出和改善的导热性。