VERTICAL CAVITY SURFACE EMITTING DEVICE WITH A BURIED INDEX GUIDING CURRENT CONFINEMENT LAYER

A vertical cavity surface emitter device (e.g., VCSEL or RC-LED) containing a buried index-guiding current confinement aperture layer which is grown, and lithographically processed to define position,shape and dimension of an inner aperture. In a regrowth process, the aperture is filled with a singl...

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Bibliographic Details
Main Authors WANG JIAXING, COOK KEVIN T, KOLEV EMIL, CHANG-HASNAIN CONSTANCE J, KAPRAUN JONAS H
Format Patent
LanguageChinese
English
Published 05.01.2021
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Summary:A vertical cavity surface emitter device (e.g., VCSEL or RC-LED) containing a buried index-guiding current confinement aperture layer which is grown, and lithographically processed to define position,shape and dimension of an inner aperture. In a regrowth process, the aperture is filled with a single crystalline material from the third contact layer. The aperture provides for both current and optical confinement, while allowing for higher optical power output and improved thermal conductivity. 一种垂直腔面发射器器件(例如,VCSEL或RC-LED)含有埋入式折射率引导型电流限制孔层,所述限制孔层生长并被光刻处理以限定内部孔的位置、形状和尺寸。在再生工艺中,所述孔被第三接触层的单晶材料填充。所述孔提供用于电流限制和光限制,同时允许更高的光功率输出和改善的导热性。
Bibliography:Application Number: CN201980030413