AN ELECTRICAL ELEMENT COMPRISING A MULTILAYER THIN FILM CERAMIC MEMBER, AN ELECTRICAL COMPONENT COMPRISING THE SAME, AND USES THEREOF

• Main Authors: MARDILOVICH PETER, FRAGKIADAKIS CHARALAMPOS, KO SONG-WON, TROLIER-MCKINSTRY SUSAN, ZHU WANLIN
• Format: Patent
• Language: Chinese; English
• Published: 15.12.2020
• Subjects: ELECTRICITY

The present invention relates to an electrical element comprising a multilayer thin film ceramic member which is a dielectric exhibiting piezoelectric/electrostrictive properties which make it suitable for use in microelectromechanical systems. In one aspect, the present invention provides an electrical element for use in microelectromechanical systems comprising: i) a thin film ceramic member formed of a plurality of layers of ceramic material having a major proportion of a perovskite (ABX3) phase, said thin film ceramic member having a first side and an opposing second side spaced apart in athickness direction; ii) first and second electrodes disposed adjacent to the thin film ceramic member, wherein, relative to each other, one of the first or second electrodes is a higher potential electrode and the other one of the first and second electrodes is a lower potential electrode, such that a potential difference may be established between the first and second electrodes and through thethin film ceramic member