REFLECTIVE OPTICAL ELEMENT FOR A RADIATION BEAM

• Main Authors: GERARDUS HUBERTUS PETRUS MARIA SWINKELS, RAMON MARK HOFSTRA, ANDREY SERGEEVICH TYCHKOV, FRANCOIS CHARLES DOMINIQUE DENEUVILLE, PETRUS ADRIANUS THEODORUS MARIA RUIJS
• Format: Patent
• Language: Chinese; English
• Published: 01.12.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermalconditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner. 本发明提供一种系统，所述系统包括具有反射表面的反射光学元件，所述反射表面被配置成反射辐射束。所述反射光学元件也具有主体。所述系统包括热调节机构，所述热调节机构可操作以在控制器的控制下以热方式引发所述主体的变形。借助于使所述主体可控制地变形，可以用受控方式调整所述反射表面的形状。