Reflective terahertz time-domain spectral thickness measurement method based on evolutionary optimization algorithm

The invention discloses a reflective terahertz time-domain spectral thickness measurement method based on an evolutionary optimization algorithm. A self-built all-optical excitation and receiving non-contact reflection type terahertz time-domain spectrum detection system is adopted, filtering noise...

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Bibliographic Details
Main Authors MAN RUNXIN, WANG KEXIN, WU BIN, LIU ZENGHUA, WU YUHENG, HE CUNFU
Format Patent
LanguageChinese
English
Published 27.11.2020
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:The invention discloses a reflective terahertz time-domain spectral thickness measurement method based on an evolutionary optimization algorithm. A self-built all-optical excitation and receiving non-contact reflection type terahertz time-domain spectrum detection system is adopted, filtering noise reduction and Fourier transform are carried out on a reference signal and a sample signal, a MATLABcross-correlation function is utilized to obtain an intrinsic phase shift, and a coating sample refractive index spectrum and an extinction coefficient spectrum in a terahertz frequency band range areobtained. The constructed terahertz wave and medium interaction theoretical model becomes more accurate, full-spectrum fitting is carried out on a theoretical reflection terahertz time-domain waveform and an experimental sample signal by utilizing an evolutionary optimization algorithm, and the number of iterations or convergence precision is determined; according to the method, the constructed terahertz wave and medium i
Bibliography:Application Number: CN202010671319