Press mold copying device, holding device for producing copying device and press mold method

The invention relates to a stamp replication device (10) for producing stamps for producing microstructured and/or nanostructured components, and the device comprises a platform (14), a cover (12) that can be positioned on the platform (14), and a holding device (32) for a stamp carrier (28), wherei...

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Bibliographic Details
Main Authors JALALI GHAZALEH, VOGLER UWE, MAY CHRISTIAN, FINK GEORG, PAWLITZEK FABIAN
Format Patent
LanguageChinese
English
Published 10.11.2020
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The invention relates to a stamp replication device (10) for producing stamps for producing microstructured and/or nanostructured components, and the device comprises a platform (14), a cover (12) that can be positioned on the platform (14), and a holding device (32) for a stamp carrier (28), wherein the holding device (32) is arranged on the cover (12) or the platform (14) and comprises a carrier(33) and a microstructured vacuum surface (34) on the carrier (33) for holding the stamp carrier (28). The invention further relates to a method for producing a holding device (32) for a stamp reproduction system (10) and to a method for producing a stamp. 一种生产用于生产微米结构化和/或纳米结构化部件的压模的压模复制设备(10)，其包括平台(14)、可定位在平台(14)上的盖(12)以及用于压模载体(28)的保持装置(32)，其中，保持装置(32)设置在盖(12)或平台(14)上并且包括载体(33)以及在载体(33)上的用于保持压模载体(28)的微米结构化真空表面(34)。此外，指定了一种生产用于压模复制设备(10)的保持装置(32)的方法以及一种用于生产压模的方法。
Bibliography:Application Number: CN202010386392