Silicon-based air-filled micro-coaxial structure and silicon-based air-filled micro-coaxial transmission line
The invention is applicable to the technical field of radio frequency microwaves, and provides a silicon-based air-filled micro-coaxial structure and a silicon-based air-filled micro-coaxial transmission line. The silicon-based air-filled micro-coaxial structure comprises an upper-layer silicon wafe...
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Main Authors | , , , , , , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
06.11.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The invention is applicable to the technical field of radio frequency microwaves, and provides a silicon-based air-filled micro-coaxial structure and a silicon-based air-filled micro-coaxial transmission line. The silicon-based air-filled micro-coaxial structure comprises an upper-layer silicon wafer, a middle-layer silicon wafer and a lower-layer silicon wafer; the upper-layer silicon wafer is provided with a first groove; the core silicon wafer of the middle-layer silicon wafer corresponds to the first groove in position; the plurality of left support beam silicon wafers of the middle-layersilicon wafer are arranged between the first silicon wafer and the core silicon wafer of the middle-layer silicon wafer; a plurality of right support beam silicon wafers of the middle-layer silicon wafer are arranged between the core silicon wafer and the second silicon wafer of the middle-layer silicon wafer; the first silicon wafer and the second silicon wafer are respectively provided with a first through hole array pe |
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Bibliography: | Application Number: CN202010519994 |