Substrate conveying device capable of adjusting width of tracks and substrate conveying method

• Main Authors: WANG XIAOWEI, ZHAO NINGBO, CAO KUIKANG, ZHONG LIJUN, MIN KUANLIANG, CAI XIONGFEI
• Format: Patent
• Language: Chinese; English
• Published: 03.11.2020
• Subjects: CONVEYING; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The invention discloses a substrate conveying device capable of adjusting the width of tracks and a substrate conveying method. The substrate conveying device comprises a case, a base of a conveying module is embedded into a cavity of the case in the front-rear direction, the two parallel tracks and a track adjusting assembly are arranged on the base of the conveying module, the tracks are arranged on the base through the track adjusting assembly, the tracks are used for conveying substrates, and the track adjusting assembly is used for adjusting the width between the two tracks; a traction clamping jaw module is mounted on the conveying module, the moving end of the traction clamping jaw module makes reciprocating motion along the tracks of the conveying module, and an upper clamping jawand a lower clamping jaw of the traction clamping jaw module move oppositely under driving of a motor for clamping or releasing the substrate; and an adjusting module is arranged at the substrate inflow end of the flow channe