Method and device for preparing gas sensor array by regulating and controlling light and temperature

• Main Authors: FAN ZHIYONG, QIU YONGCAI, ZHOU QINGFENG, CHEN ZHUO
• Format: Patent
• Language: Chinese; English
• Published: 27.10.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

The invention relates to a gas sensor array based on light and temperature regulation and control, which at least comprises a substrate body and a sensing pixel arrayarranged on the substrate body andformed by arranging a plurality of sensing pixels. The sensing pixel comprises at least one heating assembly, a gas sensitive unit and at least one light emitting diode, the gas sensitive unit is arranged between the heating assembly and the light emitting diode; the heating assembly is arranged in the substrate in a manner of corresponding to the gas sensitive unit; the lightemitting diode is arranged in a spatial position where the irradiation range can cover the surface of the gassensitive unit; under the condition that the temperature parameter of the heating assembly and the light parameter of the lightemitting diode are respectively and independently changed,resistors in the gas sensitive units form a plurality of resistance parameters having differentiated influences on the gas atmosphere based on temperat