Method and equipment for manufacturing zinc oxide, titanium oxide and nickel oxide quantum dots in same cavity

• Main Authors: SHI JIANJUN, HUANG JIACAI, HUANG YAZHOU, XU KUNSHAN, BIAN RONG, JIA QIAN
• Format: Patent
• Language: Chinese; English
• Published: 27.10.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The embodiment of the invention discloses a method and equipment for manufacturing zinc oxide, titanium oxide and nickel oxide quantum dots in the same cavity, relates to the technical field of new energy, and is convenient for industrialization and large-scale application of the quantum dots. The method comprises the following steps of: putting a sample substrate into a reaction cavity, and starting a vacuum system to vacuumize the reaction cavity; inputting -OH organic matter gas into the reaction cavity as a -OH plasma gas source; starting a laser processing head to scan the surface of thesample substrate; starting the laser processing head to scan the surface of the sample substrate again; inputting driving gas into the reaction cavity, and starting the laser processing head to scan the surface of the sample substrate for heating; and inputting an O source precursor into the reaction cavity, and starting the laser processing head to heat the surface of the sample substrate, so that the source precursor ad