METAL INSULATOR METAL (MIM) CAPACITORS

• Main Authors: GAMBINO JEFFREY PETER, BATES KENNETH ANDREW, PRICE DAVID T, ALLMAN DERRYL, HOSE SALLIE J, PIATT GREGORY FRANK, HASEGAWA AKIHIRO
• Format: Patent
• Language: Chinese; English
• Published: 20.10.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Implementations of capacitors may include: a first electrode having a first side and a second side. The capacitor may also include a silicon nitride (SiN) layer including on the second side of the first electrode. An opening may be included in the silicon nitride layer. The capacitors may include a dielectric layer within the opening of the SiN layer. The dielectric layer may include a recess. Thecapacitor may also include a second electrode having a first side and a second side. The first side of the second electrode may be included within the recess of the dielectric layer. 本发明题为"金属绝缘体金属(MIM)电容器"。电容器的实施方式可包括：第一电极，该第一电极具有第一侧和第二侧。电容器还可包括被包括在第一电极的第二侧上的氮化硅(SiN)层。开口可被包括在氮化硅层中。电容器可包括位于SiN层的开口内的介电层。介电层可包括凹部。电容器还可包括具有第一侧和第二侧的第二电极。第二电极的第一侧可被包括在介电层的凹部内。