Flexible capacitive sensor with silver nanowires embedded into PDMS

• Main Authors: ZOU QIANG, MA ZHUOMIN
• Format: Patent
• Language: Chinese; English
• Published: 13.10.2020
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

The invention discloses a flexible capacitive sensor with silver nanowires embedded into PDMS. The flexible capacitive sensor includes a PDMS dielectric layer of a columnar microstructure, and an upper electrode and the a electrode composed of PDMS conducting films embedded with AgNWs, and the PDMS dielectric layer is manufactured in the following mode: mixing PDMS DC184 and PDMS SE1700 accordingto a preset proportion to be manufactured into PMDS mixed glue; uniformly coating the PMDS mixed glue on the glass slide twice, performing curing after the first coating is finished, and continuouslyuniformly coating to form a primary dielectric layer of the capacitive sensor; placing a PCET template with holes on the PDMS film coated for the second time, then performing vacuumizing, enabling PDMS to enter the holes of the PCET template, and forming a columnar microstructure after curing; and washing off the PCTE template to form the PDMS capacitive sensor dielectric layer. The flexible capacitive sensor can reach an