SEMICONDUCTOR STRUCTURE, MANUFACTURING METHOD THEREOF AND METHOD FOR DETECTING SHORT THEREOF

Provided is a semiconductor structure including a substrate, at least two tested structures, an isolation structure, and a short-circuit detection structure. At least two tested structures are disposed on the substrate. At least two tested structures include a conductive material. The isolation stru...

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Bibliographic Details
Main Authors SU HUNG-MING, TAKESAKO KAZUAKI, TSENG CHUNIAO
Format Patent
LanguageChinese
English
Published 15.09.2020
Subjects
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