RE-based integrated photonic and electronic layered structures
Systems and methods describe growing RE-based integrated photonic and electronic layered structures on a single substrate. The layered structure comprises a substrate, an epi-twist rare earth oxide layer over a first region of the substrate, and a rare earth pnictide layer over a second region of th...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
11.09.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Systems and methods describe growing RE-based integrated photonic and electronic layered structures on a single substrate. The layered structure comprises a substrate, an epi-twist rare earth oxide layer over a first region of the substrate, and a rare earth pnictide layer over a second region of the substrate, wherein the first region and the second region are non-overlapping.
本发明的系统和方法描述了在单个衬底上生长基于RE的集成光子和电子层状结构。所述层状结构包括衬底,在所述衬底的第一区域上的外延扭转稀土氧化物层,和在所述衬底的第二区域上的稀土磷属元素化物层,其中所述第一区域和所述第二区域是非重叠的。 |
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Bibliography: | Application Number: CN201980008924 |