MANUFACTURING METHOD OF A PIEZOELECTRIC MICROPHONE WITH PILLAR STRUCTURE

• Main Authors: LARCHER LUCA, LUGLI PAOLO, CATTANI LUCA, NILI TIZIANO, RICCI YURI
• Format: Patent
• Language: Chinese; English
• Published: 28.08.2020
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

A manufacturing method of a microphone is disclosed, wherein a patterned upper electrode (6) is obtained by means of a first deposition of conductive material in such a way to form pads (61) of the patterned electrode, and pillars (3) are formed by means of successive depositions of rigid conductive material, in aligned position on the pads (61) of the patterned electrode. The first deposition andthe successive depositions are made by means of screen-printing, dispenser-printing or spray-coating of material in liquid or semifluid state. 公开了一种麦克风的制造方法，其中通过对导电材料的第一沉积来获得图案化的上部电极(6)，从而形成图案化电极的焊盘(61)，并通过在图案化电极的焊盘(61)上的对准位置中连续沉积刚性导电材料来形成柱(3)。第一沉积和随后的沉积是通过筛网印刷、分配器印刷或喷涂液体或半流体状态的材料而进行的。