Temporary bonding and de-bonding method based on graphite

The invention discloses a temporary bonding and de-bonding method based on graphite, which comprises the steps of 1, providing a piece of slide glass, and regularly forming a groove with a certain shape on the front surface of the slide glass; and 2, placing graphite in the groove of the slide glass...

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Bibliographic Details
Main Authors GUO JING, ZHU ZHIYUAN, HAN ZHICHENG
Format Patent
LanguageChinese
English
Published 28.08.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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