FIBEROPTICALLY-COUPLED MEASUREMENT SYSTEM WITH REDUCED SENSITIVITY TO ANGULARLY-DRIVEN VARIATION OF SIGNALS UPON REFLECTION FROM WAFER
The application relates to a fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer.An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an opt...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
28.08.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The application relates to a fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer.An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.
本申请涉及一种对信号从晶 |
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Bibliography: | Application Number: CN202010102501 |