Active control air-cushion static pressure slider module for air static pressure guide rail

• Main Authors: YU SHIJIE, SHI WEIJIE, ZHANG YONGTAO, ZHANG JINGDAN
• Format: Patent
• Language: Chinese; English
• Published: 28.08.2020
• Subjects: COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; TRANSPORTING

The invention discloses an active control air-cushion static pressure slider module for an air static pressure guide rail and relates to the technical field of static pressure. The active control air-cushion static pressure slider module comprises a static pressure slider and a guide rail matched with the static pressure slider. The static pressure slider comprises a body, a piezoelectric ceramicactuator, an air cushion, a membrane, a porous material, a disc spring, an adjustment gasket, a bolt and a displacement sensor. An air cushion gap is formed between the porous material and the guide rail; and the size of the air cushion gap can be actively controlled by controlling the piezoelectric ceramic actuator. The displacement sensor is located at a position where the static pressure slidercooperates with the guide rail inside the body so as to measure the fit clearance between the static pressure slider and the guide rail as a feedback signal for control. The active control air-cushion static pressure slider m