Vacuum sputter coating machine and dust suction method thereof

• Main Authors: YU XIAOFENG, LU ZHANGWU, XU YONGJUN, LI GONGJIAN
• Format: Patent
• Language: Chinese; English
• Published: 25.08.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a vacuum sputter coating machine and a dust suction method thereof, and belongs to the coating technical field. The vacuum sputter coating machine comprises a coating chamber PR-CH, a carrying chamber LL-CH and a door opening valve. Dust suction substrates are arranged on the LL-CH and the PR-CH, or a dust suction substrate is arranged on the PR-CH. A dust bonding layer isarranged on each dust suction substrate by facing the inner side face of the corresponding chamber. When the two chambers are both provided with the dust suction substrates, the method comprises the steps that the air of the LL-CH is exhausted to be smaller than a pressure intensity threshold value; the PR-CH is subjected to inflation and purification, so that pollutants in the PR-CH are adsorbedto the corresponding dust suction substrate; after air exhaust and deflation of the LL-CH are completed, air exhaust to the LL-CH is stopped, the door opening valve is opened, air exhaust is carried out on the communicating LL