Semiconductor processing device
The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
07.08.2020
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Subjects | |
Online Access | Get full text |
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