Semiconductor processing device
The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
07.08.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower basket is provided with a feeding end and a stop end arranged oppositely; a plurality of accommodating grooves arranged in a stacked manner are arranged in the flower basket, and the opening of each accommodating groove is located on the side of the feeding end; the positioning plate is provided with a telescopic piece, which is used for pressing the bottom plate to tilt the flower basket when the flower basket is placed on the positioning plate so that the feeding end is higher than the stop end, and then retracting gradually so that the flower basket is flat on the positioning plate. Through the embodiment of the application, the impact generated between the flower basket and the positioning plate is effectively |
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Bibliography: | Application Number: CN202010301645 |