Semiconductor processing device
The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | Chinese English |
Published |
07.08.2020
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower basket is provided with a feeding end and a stop end arranged oppositely; a plurality of accommodating grooves arranged in a stacked manner are arranged in the flower basket, and the opening of each accommodating groove is located on the side of the feeding end; the positioning plate is provided with a telescopic piece, which is used for pressing the bottom plate to tilt the flower basket when the flower basket is placed on the positioning plate so that the feeding end is higher than the stop end, and then retracting gradually so that the flower basket is flat on the positioning plate. Through the embodiment of the application, the impact generated between the flower basket and the positioning plate is effectively |
---|---|
AbstractList | The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading chamber, and a flower basket; a positioning plate for carrying the flower basket is arranged in the loading chamber; the bottom plate of the flower basket is provided with a feeding end and a stop end arranged oppositely; a plurality of accommodating grooves arranged in a stacked manner are arranged in the flower basket, and the opening of each accommodating groove is located on the side of the feeding end; the positioning plate is provided with a telescopic piece, which is used for pressing the bottom plate to tilt the flower basket when the flower basket is placed on the positioning plate so that the feeding end is higher than the stop end, and then retracting gradually so that the flower basket is flat on the positioning plate. Through the embodiment of the application, the impact generated between the flower basket and the positioning plate is effectively |
Author | JIA LISONG |
Author_xml | – fullname: JIA LISONG |
BookMark | eNrjYmDJy89L5WSQD07NzUzOz0spTS7JL1IoKMpPTi0uzsxLV0hJLctMTuVhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfHOfoaGhqYGhgZGho7GxKgBACxRJug |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | 半导体加工设备 |
ExternalDocumentID | CN111501021A |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_CN111501021A3 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 14:56:03 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | Chinese English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_CN111501021A3 |
Notes | Application Number: CN202010301645 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200807&DB=EPODOC&CC=CN&NR=111501021A |
ParticipantIDs | epo_espacenet_CN111501021A |
PublicationCentury | 2000 |
PublicationDate | 20200807 |
PublicationDateYYYYMMDD | 2020-08-07 |
PublicationDate_xml | – month: 08 year: 2020 text: 20200807 day: 07 |
PublicationDecade | 2020 |
PublicationYear | 2020 |
RelatedCompanies | BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD |
RelatedCompanies_xml | – name: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD |
Score | 3.4076118 |
Snippet | The embodiment of the application provides a semiconductor processing device. The semiconductor processing device includes a process chamber, a loading... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
Title | Semiconductor processing device |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200807&DB=EPODOC&locale=&CC=CN&NR=111501021A |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMU8C1gJJpqa6xsmpFromKcamukmGRmm65hbJwPZvsnGyaQpoQN_Xz8wj1MQrwjSCiSELthcGfE5oOfhwRGCOSgbm9xJweV2AGMRyAa-tLNZPygQK5du7hdi6qEF7x6DJfANzNRcnW9cAfxd_ZzVnZ1tnPzW_IFtDUMsHdI21IzMDK6gZDTpn3zXMCbQrpQC5SnETZGALAJqWVyLEwFSVIczA6Qy7eU2YgcMXOuENZELzXrEIg3wwaB17fh7ogNb8IoUCyAp_YM2jkJIKyu6iDIpuriHOHrpAm-Lh3op39kM4yliMgQXY3U-VYFAwM0wDNuGNLBKNgVVvWqKZRVJSkqlRooVRqomBSbJhsiSDFG5zpPBJSjNwgYIIvHzNXIaBpaSoNFUWWKWWJMmBwwIAtk55aA |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_mFOebTkXnxypI34rrd1-KuHSl6toNrbK30qQt6sNatorgX-8lds4XfQsJXJKDy-_uch8AlzZFFKCmqegsdxQj002Fqlqh2A5D_ZfpzMy4Qz-MrODJuJuZsxa8rXJhRJ3QD1EcESWKobzX4r2u1k4sT8RWLq_oK06V137senJjHfPP_IEte0N3NJ14EyIT4pJIjh5clWs-vI31zQZs2mgSClPpecizUqrfkOLvwtYUqc3rPWh9vnShQ1ad17qwHTYf3jhsZG-5D_1HHsdeznmB1nIhVd8R_og8UpZzcT-AC38Uk0DBnZKfayUkWh9KP4Q2mvv5EUiWWqAKrzmpjtBbpJZDKTW11NFyY2AwlR1D7286vf8W-9AJ4nCcjG-j-xPY4ewSoWz2KbTrxXt-hvBa03PBly-IQHxS |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Semiconductor+processing+device&rft.inventor=JIA+LISONG&rft.date=2020-08-07&rft.externalDBID=A&rft.externalDocID=CN111501021A |