Processing equipment and method before metal electroplating

The invention provides processing equipment and method before metal electroplating. The processing equipment before metal electroplating includes a vacuum device, a closed heating device and a hydrogen device; the vacuum device communicates with the closed heating device; the hydrogen device communi...

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Bibliographic Details
Main Author ZOU BENHUI
Format Patent
LanguageChinese
English
Published 17.07.2020
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Summary:The invention provides processing equipment and method before metal electroplating. The processing equipment before metal electroplating includes a vacuum device, a closed heating device and a hydrogen device; the vacuum device communicates with the closed heating device; the hydrogen device communicates with the closed heating device; the closed heating device is used for heating metal; the vacuum device is used for vacuum processing metal in the closed heating device; and the hydrogen device is used for introducing hydrogen gas into the closed heating device. The processing equipment is usedto improve the bonding force of the electroplated metal. 本申请提供一种金属电镀前的处理设备及处理方法。金属电镀前的处理设备,包括:真空装置;密闭加热装置,所述真空装置与所述密闭加热装置连通;氢气装置,所述氢气装置与所述密闭加热装置连通;其中,所述密闭加热装置用于加热金属;所述真空装置用于对所述密闭加热装置内的金属进行真空处理;所述氢气装置用于往所述密闭加热装置中通入氢气。该处理设备用以提高电镀金属的结合力。
Bibliography:Application Number: CN202010482197