Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module

• Main Authors: LING SIYING, XIE BO, SANG QI, FAN GUANGZHAO, CAI YINDI, WEN ZHIXIANG
• Format: Patent
• Language: Chinese; English
• Published: 14.07.2020
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention belongs to the field of positioning platform motion error measurement, and provides a semiconductor laser six-degree-of-freedom error measurement system based on an interferometer module. The system comprises an interferometer module and a five-degree-of-freedom error measurement module. A semiconductor laser is used as a light source. The interferometer module based on the interferometer ranging principle is used for measuring positioning errors and axial motion errors of the linear positioning platform and the rotary positioning platform. The interferometer module adopts an integrated design, so the ghosting phenomenon among the optical elements is reduced. Meanwhile, the size of the interferometer module is reduced. The five-degree-of-freedom error measurement module basedon laser collimation and laser auto-collimation principles is used for measuring a two-dimensional linearity error and a three-dimensional angle error of the linear positioning platform or a two-dimensional inclination angle