Plasma photoresist removing device

The invention relates to a plasma photoresist removing device. The device comprises a vacuum chamber, a rotating shaft penetrating through the bottom of the vacuum chamber in the vertical direction, arotating shaft driving mechanism in transmission connection with the bottom of the rotating shaft, a...

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Bibliographic Details
Main Authors LIU PENG, PAN YUNXIANG, PENG XINGCUI
Format Patent
LanguageChinese
English
Published 30.06.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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