Cleanliness monitor and method for monitoring cleanliness of vacuum chamber

• Main Authors: RUACH-NIR IRIT, EYTAN GUY, SCHULMAN MAGEN, EILON MICHAL
• Format: Patent
• Language: Chinese; English
• Published: 19.06.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

A cleanliness monitor for monitoring cleanliness of a vacuum chamber is disclosed. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. Themolecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, arelease of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals. 一种用于监测真空腔室的清洁度的清洁度监测器。所述清洁度监测器可包括质谱仪、分子聚集和释放单元、以及分析器。所述分子聚集和释放单元被配置为(a)在聚集时期期间聚集存在于所述真空腔室中的有机分子和(b)在释放时期期间朝向所述质谱仪诱导所述有机分子的子集的释放。所述质谱仪被配置为：监测所述真空腔室内的环境，和产生指示所