AROMATIC AMINO SILOXANE FUNCTIONALIZED MATERIALS FOR USE IN CAPPING POROUS DIELECTRICS

• Main Authors: PADMANABAN MUNIRATHNA, BOBADE SACHIN, BASKARAN DURAIRAJ, POLISHCHUK OREST
• Format: Patent
• Language: Chinese; English
• Published: 05.06.2020
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; BASIC ELECTRIC ELEMENTS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; ORGANIC CHEMISTRY; SEMICONDUCTOR DEVICES

The present invention relates to new aromatic-amino functional siloxanes, which are compounds comprising one or two tail groups X2, and a linking group L of structure (2) linking each said tail groupto said head group, wherein the head group X has structure (1), containing an optional organic moiety Y,wherein the attachment point of said tail group X2 through said linking group L to the head group X1, may be, at positions a, b, c, d, or e. Another aspect of this invention are compositions containing these novel aromatic amino functional siloxane. A further aspect of this invention are compositions comprised of the above novel aromatic-amino functional siloxanes, and also the composition resulting from the aging of these compositions at room temperature for about 1 day to about 4 weeks. Still further aspects of this invention are processes for forming self-assembled monolayers on a substrate, from the aged composition, and also the processes of coating these aged compositions on patterned porous dielectrics to