Chemical polishing method for improving uniformity of inner pores of laser gyroscope cavity

• Main Authors: YANG CHANGCHENG, XIONG CHANGXIN, WANG CHAN, NIE JUNQING, LIU JUNHAN
• Format: Patent
• Language: Chinese; English
• Published: 15.05.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE

The invention relates to a chemical polishing method for improving the uniformity of inner pores of a laser gyroscope cavity. The chemical polishing method comprises the following steps that a non-corrosive region of a laser gyroscope cavity to be polished is pasted with an adhesive tape, and a pre-protection cavity is formed; the pre-protection cavity is suspended in a corrosive liquid and the inner holes to be corroded are ensured to be fully exposed, the total corrosion time is taken as a corrosion cycle, and the cavity is rotated by 90 degrees in the same clockwise direction every quarterof the corrosion period to obtain the corrosion cavity; the corrosive liquid is a hydrofluoric acid / nitric acid aqueous solution and a hydrofluoric acid / hydrochloric acid aqueous solution or a hydrofluoric acid / sulfuric acid aqueous solution, the corrosion cavity is placed in a neutralization solution for immersion washing, and then is subjected to water washing and drying to obtain the corrosion cavity. By adopting