Liquid collecting device, developing/etching machine table and developing/etching method

• Main Author: JIAN YONGXING
• Format: Patent
• Language: Chinese; English
• Published: 12.05.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

The invention discloses a liquid collecting device, a developing/etching machine table and a developing/etching method. The liquid collecting device comprises a collecting tank, and an annular shielding piece arranged in the collecting tank so as to divide the collecting tank into an inner chamber and an outer chamber which are independent; the inner chamber is used for accommodating a bearing platform, and the bearing platform is used for bearing a processed object; the annular shielding piece comprises an annular body and an extension part connected with the annular body; the extension partis arranged on the annular body in a contractible mode and contracts or expands according to the treatment objects of different sizes borne on the bearing platform, so that the distance between the annular shielding piece and the outer edges of the treatment objects is adjusted, and liquid medicine flowing out of the outer edges of the treatment objects can be collected into the outer cavity. By means of the mode, the uni