INFORMATION DETERMINING APPARATUS AND METHOD

• Main Authors: NIKIPELOV ANDREY, POLYAKOV ALEXEY O, PETERSON BRENNAN, GAO AN, LALBAHADOERSING SANJAYSINGH
• Format: Patent
• Language: Chinese; English
• Published: 01.05.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

The present disclosure describes an apparatus (160) for determining information relating to at least one target alignment mark (114) in a semiconductor device substrate (110). The target alignment mark (114) is initially at least partially obscured by an opaque carbon or metal layer (120) on the substrate (110). The apparatus (160) includes an energy delivery system (140) configured to emit a laser beam (132) for modifying at least one portion (134) of the opaque layer (120) to cause a phase change and/or chemical change in the at least one portion (134) that increases the transparency of theportion (134). An optical signal (136) can propagate through the modified portion (134) to determine information relating to the target alignment mark (114). 本公开描述了一种用于确定与半导体器件衬底(110)中的至少一个目标对准标记(114)有关的信息的设备(160)。所述目标对准标记(114)最初至少部分被衬底(110)上的不透明的碳或金属层(120)遮挡。所述设备(160)包括能量传递系统(140)，所述能量传递系统(140)配置成发射激光束(132)，以使所述不透明层(120)的至少一部分(134)改性从而使得在所述至少一部分(134)中发生提高所述部分(134)的透明度的相变和/或化学变化。光学信号(136)能够传播通过被改性的部分(134)以确定与目标对准标记(114)有关