Method for detecting warping of suspended structure

• Main Authors: KANG XIAOXU, ZHONG XIAOLAN
• Format: Patent
• Language: Chinese; English
• Published: 28.04.2020
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a method for detecting warping of a suspended structure. The method comprises the following steps: S01, arranging a suspended structure and a non-suspended structure with the same structure on a substrate; S02, carrying out overlooking imaging on the suspended structure and the non-suspended structure over the suspended structure, and acquiring a length CD1 and a width CD2of a micro-bridge according to an imaging graph; S03, under the condition that the length CD1 of the micro-bridge is smaller than the length CD1' of the micro-bridge in the non-suspended structure orthe width CD2 of the micro-bridge is smaller than the width CD2' of the micro-bridge in the non-suspended structure, demonstrating that the micro-bridge warps, and entering a S04; S04, measuring focallengths of different positions of the micro-bridge in the suspended structure and determining downward warping at the position under the condition that the focal lengths are greater than the focal length of the corresponding p