Film forming apparatus and method, and manufacturing system and method of organic EL panel

• Main Authors: TAKATSU KAZUMASA, KOUNO TAKASHI
• Format: Patent
• Language: Chinese; English
• Published: 21.04.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a film forming apparatus, a manufacturing system, a manufacturing system of an organic EL panel, a film forming method, and a manufacturing method of an organic EL element. Inorder to improve the utilization efficiency and productivity of a vapor deposition material in a vap...