Epitaxial process quartz weldment and processing method thereof

• Main Authors: LI BAOJUN, ZHANG ZHONGSHU, WANG LIANLIAN, SUN YUNTAO, WANG JIANLI, BIAN ZHANNING, ZHANG JUAN, CHEN QIANG, ZHAO HE, YU YANG, ZHANG LIANXING, FENG JIYAO
• Format: Patent
• Language: Chinese; English
• Published: 07.04.2020
• Subjects: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS

The invention discloses an epitaxial process quartz weldment and a processing method thereof. The epitaxial process quartz weldment comprises a first milky white quartz ingot, a butt joint hole, a first transparent quartz, a second transparent quartz, a ball head body, a quartz rotating shaft, a second milky white quartz ingot, a bracket and a silicon wafer, wherein the butt joint hole is formed in the first milky white quartz ingot, the first transparent quartz and the first milky white quartz ingot are welded into a whole, the lower end of the first transparent quartz is fixedly connected with the second transparent quartz, the lower portion of the second transparent quartz is fixedly connected with the ball head body, the quartz rotating shaft is embedded in the first transparent quartzand the second transparent quartz, the first milky white quartz ingot is annular, and a quartz ring gasket groove matched with a butt flange is formed in the upper end surface of the first milky white quartz ingot. 本发明公开一种外延