Silicon dioxide layer, method for manufacturing same, composition for forming same, and electronic device
Disclosed are a composition for forming a silicon dioxide layer, a method for manufacturing the silicon dioxide layer using the composition, the silicon dioxide layer manufactured by the method, and an electronic device including the silicon dioxide layer; the composition for forming the silicon dio...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
24.03.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed are a composition for forming a silicon dioxide layer, a method for manufacturing the silicon dioxide layer using the composition, the silicon dioxide layer manufactured by the method, and an electronic device including the silicon dioxide layer; the composition for forming the silicon dioxide layer comprising: a silicon-containing polymer including polysilazanes, polysilazanes, or combinations thereof; and a solvent, in which the silicon-containing polymer has a weight average molecular weight in terms of polystyrene of 4,000 g/mol to 13,000 g/mol and satisfies Equation 1, in whichEquation 1: A indicates a peak area of the silicon-containing polymer in a gel permeation chromatography curve in terms of weight average molecular weight of polystyrene from 2,700 g/mol to 9,000 g/mol, and B indicates the peak area of the silicon-containing polymer in the gel permeation chromatography curve in terms of weight average molecular weight of polystyrene from 200 g/mol to 2,700 g/mol.[Equation 1] 0.98< = B/A < |
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Bibliography: | Application Number: CN201811610012 |