NON-TRANSITORY COMPUTER-READABLE MEDIUM AND METHOD FOR MONITORING A SEMICONDUCTOR FABRICATION PROCESS

• Main Authors: CHOI TAELIM, LEEM CHOONSIK, KIM YONGDEOK
• Format: Patent
• Language: Chinese; English
• Published: 20.03.2020
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

A non-transitory computer-readable medium for monitoring a semiconductor fabrication process includes an image conversion model having an artificial neural network. The image conversion model, when executed, causes the processor to receive a first image and a second image of a semiconductor wafer. The artificial neural network is trained by inputting a dataset representing the first image and thesecond image, generating a conversion image of the semiconductor wafer and calibrating weights and biases of the artificial neural network to match the conversion image to the second image. A third image of the semiconductor wafer is generated based on the calibrated weights and biases of the artificial neural network. The image conversion model with the trained artificial neural network may be transmitted to another device for image conversion of low resolution images. 一种用于监视半导体制造过程的非暂时性计算机可读介质包括具有人工神经网络的图像转换模型。所述图像转换模型当被执行时使处理器接收半导体晶片的第一图像和第二图像。通过以下操作来训练所述人工神经网络：输入表示所述第一图像和所述第二图像的数据集，生成所述半导体晶片的转换图像，以及校准所述人工神经网络的权重和偏