Cooling device applied to single crystal furnace and single crystal furnace

• Main Author: DENG XIANLIANG
• Format: Patent
• Language: Chinese; English
• Published: 31.01.2020
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The invention provides a cooling device applied to a single crystal furnace and the single crystal furnace, wherein the cooling device and the single crystal furnace are used for drawing a high-quality single crystal silicon rod; the cooling device is characterized by comprising a water cooling sleeve and a heat conduction accessory; the water cooling sleeve comprises an annular cooling water circulating pipeline arranged in the water cooling sleeve; the heat conduction accessory is fixedly connected to the bottom end of the water cooling sleeve and extends downwards by a certain length; the heat conduction accessory is used for absorbing heat of the single crystal silicon rod and conducting the heat to the water cooling sleeve for cooling; a cavity is formed in the center of the heat conduction accessory so as to allow the single crystal silicon rod to pass through; the cooling rate of the single crystal silicon rod is adjusted by reasonably controlling the temperature distribution ofthe upper part of the li