Three-degree of freedom rotating platform

The invention provides a three-degree of freedom rotating platform. The three-degree of freedom rotating platform comprises a substrate platform, a first horizontal moving assembly and a second horizontal moving assembly; the substrate platform can be driven to rotate; the substrate platform is prov...

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Bibliographic Details
Main Authors BAI YU, SHENG TIANCHENG, XIA LEI, GUO YONG, SU SHISHENG, PENG YANKE
Format Patent
LanguageChinese
English
Published 17.01.2020
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Summary:The invention provides a three-degree of freedom rotating platform. The three-degree of freedom rotating platform comprises a substrate platform, a first horizontal moving assembly and a second horizontal moving assembly; the substrate platform can be driven to rotate; the substrate platform is provided with a first direction guide structure; the first horizontal moving assembly is glidingly connected onto the first direction guide structure; the first horizontal moving assembly is provided with a second direction guide structure; the second horizontal moving assembly is glidingly connected onto the second direction guide structure; and an included angle alpha is formed by the projection of the guide direction of the first direction guide structure and the projection of the guide directionof the second direction guide structure on a plane perpendicular to a rotating shaft of the substrate platform, and alpha is greater than 0 degree and less than 180 degrees. According to the three-degree of freedom rotating
Bibliography:Application Number: CN201911105673