METHOD AND APPARATUS FOR ADHESION FORCE MEASUREMENT BETWEEN PLANAR SURFACES

• Main Authors: ZHELEV NIKOLAY ZHELEV, COLE CARLTON WESLEY, AGNELLO GABRIEL PIERCE, MANLEY ROBERT GEORGE, BROWN TATYANA VYACHESLAVOVNA, KNOWLES PETER
• Format: Patent
• Language: Chinese; English
• Published: 07.01.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A method and apparatus for measuring adhesion force between planar surfaces includes a force measurement gauge and a substrate contacting component having a planar surface with at least one opening orindented channel that is in fluid communication with a vacuum source. The apparatus and a substrate having a planar surface are moved relative to each other between first, second, and third positionsin order to determine an adhesion force between the planar surfaces of the substrate contacting component and the substrate. 用于测量平面表面之间的粘附力的方法和设备包括力测量仪和具有平面表面的基材接触部件，所述平面表面具有至少一个开口或凹陷的通道，其与真空源流体连通。所述设备和具有平面表面的基材相对于彼此在第一位置、第二位置和第三位置之间移动，以确定基材接触部件的平面表面与基材的平面表面之间的粘附力。