COIL ACTUATED PRESSURE SENSOR

• Main Authors: DU HAMEL DE MILLY XAVIER, PANNETIER-LECOEUR MYRIAM, DOOGUE MICHAEL C, LATHAM ALEXANDER, FERMON CLAUDE
• Format: Patent
• Language: Chinese; English
• Published: 07.01.2020
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A pressure sensor includes a chamber comprising a conductive portion and a deformable portion coupled to the conductive portion and susceptible to deformation in response to a pressure differential between an interior of the chamber and an exterior of the chamber; at least one coil responsive to an AC coil drive signal; at least one magnetic field sensing element disposed proximate to the at leastone coil and to the conductive portion of the chamber and configured to generate a magnetic field signal in response to a reflected magnetic field generated by the at least one coil and reflected bythe conductive portion; and a circuit coupled to the at least one magnetic field sensing element to generate an output signal of the pressure sensor indicative of the pressure differential between theinterior of the chamber and the exterior of the chamber in response to the magnetic field signal. 压力传感器包括：腔室，所述腔室包括传导性部分和联接到传导性部分的可变形部分，并且可变形部分易于响应于腔室的内部与腔室的外部之间的压力差而变形；响应于AC线圈驱动信号的至少一个线圈；至少一个磁场感测元件，其邻近所述至少一个线圈且邻近所述腔室的传导性部分设置，