Image detection device and method for internal defect of semiconductor silicon crystal column

• Main Authors: LIN HUOWANG, LIU LIQING, LIAO WENMIN
• Format: Patent
• Language: Chinese; English
• Published: 17.12.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention discloses an image detection device and method for an internal defect of a semiconductor silicon crystal column. The image detection device comprises a rack, an electric control box, a rotating ring device, an image capturing device and a marking device; a feeding groove and a discharging groove are formed in the rack, conveying devices are arranged in the feeding groove and the discharging groove respectively, and an operation space is formed between the discharging groove and the feeding groove; the rotating ring device is vertically arranged in the rack and located in the operation space, and comprises a rotating ring and a first driving mechanism, and the first driving mechanism is connected with the electric control box and drives the rotating ring to run; the image capturing device and the marking device are both arranged on the rotating ring and rotate along with the rotating ring. By cooperatively utilizing the electric control box, the rotating ring device, the image capturing device an