Knife side nozzle component, knife blade cooling device and dicing saw

• Main Authors: LAN JIAN, SUN YAHUI, ZHAO TONGYU, CHEN ZHIHUI, WU ZHENBO
• Format: Patent
• Language: Chinese; English
• Published: 26.11.2019
• Subjects: PERFORMING OPERATIONS; TRANSPORTING; WORKING CEMENT, CLAY, OR STONE; WORKING STONE OR STONE-LIKE MATERIALS

The invention relates to the technical field of wafer processing equipment, in particular to a knife side nozzle component, a knife blade cooling device and a dicing saw. The dicing saw comprises a rack, an air static pressure high-speed spindle and the knife blade cooling device, wherein the knife blade cooling device is installed on one end of the spindle for installing the knife blade; the knife blade cooling device comprises a fixed base, a blade main cooling nozzle and a blade side nozzle component; the blade main cooling nozzle is installed on the fixed base; the knife side nozzle component is installed on the fixed base, the knife side nozzle component comprises a nozzle base and a knife side nozzle, the knife side nozzle is installed on the nozzle base and is provided with a blowing pipe section for blowing the blade from the axial side of the blade; and when in use, the knife side nozzle which located on the outside of the blowing pipe section rotates or is installed on the nozzle base through a univ